Micronix Advanced Capabilities: Vacuum

Vacuum Rated Positioners

Vacuum chambers are essential in advanced research and manufacturing, providing controlled low-pressure environments where even microscopic contamination or positional errors can affect results. Maintaining precise motion in these conditions requires careful management of component materials, including considerations for outgassing, thermal expansion, venting, and bake-out procedures.

Micronix vacuum-compatible position stages are engineered to meet these challenges with validated, high-precision performance for both High Vacuum (HV) and Ultra High Vacuum (UHV) applications. Many standard products are available in vacuum-ready configurations, enabling engineers to quickly and confidently integrate proven, reliable precision motion into demanding low-pressure systems.

High Vacuum (HV), 10^-6 mbar

• Linear encoder compatible with HV
• Teflon insulated wire cables with braided, silver-plated copper shielding
• Standard limit switches
• Stainless steel hardware and un-anodized components
• Bearings and drive screws lubricated with vacuum grease
• Vented holes where possible
• Bake-out up to 80°C for 48 hours
• Optional HV compatible D-sub connectors for motor and encoder
• Positioner motor types include piezo, stepper, and BLDC
• Shipped parts are vacuum packed with double bagging

Ultra High Vacuum (UHV), 10-9 mbar

• Linear encoder compatible with UHV
• Teflon insulated wire cables with braided, silver-plated copper shielding or optional Kapton wires
• Sealed limit switches
• Stainless steel hardware and un-anodized components
• Stainless steel or ceramic bearings and drive screws, lubricated with UHV-compatible grease
• Vented holes where possible
• Bake-out up to 100°C for 48 hours
• Optional UHV compatible D-sub connectors for motor and encoder
• Positioner motor types include piezo and stepper; BLDC possible for OEM specifications
• Shipped parts are vacuum packed with double bagging

Example of Micronix vacuum rated builds showing modified components

Connector Flexibility for Vacuum Applications

Standard configurable Micronix HV and UHV products are equipped with D-sub 9 connectors for open-loop systems and D-sub 15 connectors for closed-loop systems. These connectors support functionality testing and simulate vacuum feedthroughs before installation. Upon request, stages can be fitted with HV- or UHV-compatible D-sub connectors.